Trichlorosilane (TCS) and Silane Production Packages
Modular Equipment Solution and Engineering Packages
GT Solar offers a modular equipment solution and basic engineering packages (BEPs) that save you time and money. We work closely with your engineering, procurement, and construction (EPC) firm while they design the facility and manage the installation. Then, we provide the technical support and training your operators need to start-up and operate your facility. Once you’re up-and-running, we provide the analytical solutions that help you assess your plant operations at four critical touch points: polysilicon, TCS and silane, incoming raw material, and environmental effluent streams.
Design that Reduces Capital Investment and Operating Costs Hydrochlorination is GT Solar’s newest TCS production technology solution available to the semiconductor and solar industries. Producing TCS via hydrochlorination technology not only reduces capital investment by 10 to 15 percent, it also lowers annual operating costs by about 15 percent. The basis for this substantial savings is a result of removing the electricity intensive STC converter from the process, in both equipment and operation.
GT Solar’s TCS Production Technology solution ties TCS to GT Solar’s family of chemical vapor deposition (CVD) reactors, enabling you to drive down the cost of production and amplify the return on your investment.
TCS Production Technology Solution Bundled Deliverables
Basic Engineering Package (BEP)
Equipment
Modular Process Plant
Operating Instructions
Analytical Support
Commissioning/Start-up Support
Packaging and Transportation Expertise
For more information about GT Solar's TCS Production Packages, contact: Phone: +1 (406) 532-0120 Email: polysilicon@gtsolar.com
Silane Modular Production Unit
Design that Decreases Site Work and Accelerates Installation
Designed as a standalone facility to produce VLSI grade silane for semiconductor and solar markets, GT Solar's Modular 500-1000 MTPA Silane Production Plant is constructed using efficient structural modules that decrease site work and accelerate installation. The module, which includes work practice control and standardization, provides flexibility through scalability to speed start-up with less cost. It allows us to work torward our goal of helping you manufacture your silane plant and begin delivering quality product within 24 months.
Silane Modular Production Unit Bundled Deliverables
Site Evaluation
Block Flow Diagrams
Process Flow Diagrams
Piping and Instrumentation Diagrams
Basic Engineering Package (BEP)
Equipment and Structure
Manage Installation
Technical Staff Training
Start-Up Support
Operating Guidelines
Analytical Equipment
Control System
Additional Silane Modular Production Unit Options:
TCS fed from an existing polysilicon production facility (OSBL) to the silane plant. In return, the silane plant sends STC back to an existing STC hydrogenation process (OSBL).
Outsourced TCS or STC (OSBL) fed to the silane plant, which has STC hydrogenation and off-gas recovery capability.
For more information about GT Solar's Silane Production Packages, contact: Phone: +1 (406) 532-0120 Email: polysilicon@gtsolar.com
